VacIon Plus 20 Pump

The Agilent VacIon Plus 20 pump is a medium-sized 20 L/s ion pump. It is ideal for a wide range of ultrahigh and extreme high vacuum applications for academic and high-energy physics (HEP) research, and medical equipment use for imaging and radiation therapy.

This pump is available with a diode element for general use, and StarCell and Noble Diode elements when a gas mixture is being pumped. The patented StarCell element handles high amounts of noble gases and hydrogen and provides the highest speed and capacity for methane, argon, and helium. Customer-selected options like element type, integral heaters, and high-voltage feedthroughs are available for easy system integration and consistent particle-free UHV pumping performance.

Product details Related Product


  • Select from StarCell, diode, and noble diode elements to achieve the best pumping speed for different gases
  • Available with ConFlat 2.75² rotatable flange and a choice of feedthroughs (Fischer, King, DESY, Varian, SHV 10kV (Safeconn)) in different orientations
  • No moving parts ensures vibration-free operation for sensitive applications
  • Low leakage current provides stable vacuum pressure reading
  • Low magnetic field minimize system interference
  • Vacuum processed at >400 °C and pinched off under vacuum to ensure cleanliness and vacuum integrity prior to installation
  • Customizable with different high voltage feedthroughs, body geometries, additional ports, and pumping cell arrangements and available with optically shielded baffles, external heaters, and magnetic shielding to meet your needs
  • SEM versions available with ultralow leakage current and high stability for minimal electrical interference
  • Special testing procedures for your specific requirements can be added


Element Type
  • StarCell
  • Noble Diode
  • Diode
  • SEM
Feedthrough Style
  • Fischer
  • SHV
Heater Power
  • 140 W
Heater Voltage
  • 100-120/200-240 V
Inlet Flange
  • 2 ¾ inch CFF (NW 35)
Maximum Baking Temperature
  • 350 °C
Maximum Starting Pressure
  • ≤5 x 10-2 mbar
Operating Life
  • 80,000 hours
Ultimate Pressure
  • < 1 x 10-11 mbar
Weight (pump only)
  • 7 kg
  • 15 lbs



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