VacIon Plus 40 Pump

The Agilent VacIon Plus 40 pump is a medium-sized 40 L/s ion pump for use in general-purpose UHV and XHV systems for evacuating electron devices, scanning electron microscopes (SEM), and in academic and high-energy physics (HEP) research.

This pump delivers stable vacuum and low leakage current, protecting critical components in SEM applications. The combination of our patented anode design and StarCell element deliver a powerful solution to optimize E-beam columns. User-selected options like high-voltage (HV) feedthroughs are available for easy system integration.

Product details Related Product


  • Select from StarCell, diode, and noble diode elements to provide the best pumping speed for different gases
  • Available with ConFlat 2.75² non-rotatable flange, additional 2.75² ConFlat port, and a choice of feedthroughs (Fischer, King, DESY, Varian, SHV 10kV (Safeconn)) in different orientations
  • No moving parts ensures vibration-free operation for sensitive applications
  • Low leakage current provides stable vacuum pressure reading
  • Low magnetic field minimizes system interference
  • Vacuum processed at >400 °C and pinched off under vacuum to ensure cleanliness and vacuum integrity prior to installation
  • Customizable with different high-voltage feedthroughs, body geometries, additional ports, and pumping cell arrangements and available with optically shielded baffles, external heaters, and magnetic shielding to meet your needs
  • SEM versions are available with ultralow leakage current and high stability for minimal electrical interference
  • Special testing procedures for your specific requirements can be added


Element Type
  • StarCell
  • Noble Diode
  • Diode
  • SEM
Feedthrough Style
  • Fischer
  • SHV
Heater Power
  • 250 W
Heater Voltage
  • 100-120/200-240 V
Inlet Flange
  • 2 ¾ inch CFF (NW 35)
Maximum Baking Temperature
  • 350 °C
Maximum Starting Pressure
  • ≤5 x 10-2 mbar
Operating Life
  • 80,000 hours
Ultimate Pressure
  • < 1 x 10-11 mbar
Weight (pump only)
  • 17 kg
  • 37 lbs



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