VacIon Plus 75 Pump

The Agilent VacIon Plus 75 pump is a 75 L/s ion pump used in ultrahigh and extreme high vacuum applications in academic and high-energy physics (HEP) research. It delivers increased pumping speed in the same compact size as other VacIon Plus medium ion pumps, ideal for large chamber applications that require greater pumping speed.

The patented StarCell element delivers best-in-class pumping speeds for noble gases and hydrogen, and the highest capacity for methane, argon, and helium. Options like optical baffles, integral heaters, and high-voltage (HV) feedthroughs are available for easy system integration.

Product details Related Product


  • Select from StarCell, diode, and noble diode elements to provide the best pumping speed for different gases
  • Available with ConFlat 6² non-rotatable flange, additional 2.75² ConFlat port, and a choice of feedthroughs (Fischer, King, DESY, Varian, SHV 10kV (Safeconn)) in different orientations
  • No moving parts ensures vibration-free operation for sensitive applications
  • Low leakage current provides stable vacuum pressure reading
  • Low magnetic field minimizes system interference
  • Vacuum processed at >400 °C and pinched off under vacuum to ensure cleanliness and vacuum integrity prior to installation
  • Customizable with different high-voltage feedthroughs, body geometries, additional ports, and pumping cell arrangements and available with optically shielded baffles, external heaters and magnetic shielding to meet your needs
  • SEM versions are available with ultralow leakage current and high stability for minimal electrical interference
  • Special testing procedures for your specific requirements can be added


Element Type
  • StarCell
  • Noble Diode
  • Diode
  • SEM
Feedthrough Style
  • Fischer
  • SHV
Heater Power
  • 250 W
Heater Voltage
  • 100-120/200-240 V
Inlet Flange
  • 6 inch CFF (NW100)
Maximum Baking Temperature
  • 350 °C
Maximum Starting Pressure
  • ≤5 x 10-2 mbar
Operating Life
  • 80,000 hours
Ultimate Pressure
  • < 1 x 10-11 mbar
Weight (pump only)
  • 19 kg
  • 42 lbs



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