Tiếng ViệtTSP Cartridge
The titanium sublimation pump (TSP) cartridge is an effective way to pump all getterable gases in UHV/XHV systems. The TSP can be added to the inside of the ion pump or as a separate pumping unit. Use with the liquid cooled cryopanel enables lower temperatures that further improve pumping speed for intermediate gases.
Filament-type TSP sources are most popular with UHV systems since they can be turned off between sublimations and thus do not add thermally induced outgassing. The ball-type sources contain larger amounts of titanium, which means longer life when operated under conditions that use more titanium, such as higher operating pressures.
