VacIon Plus 55 Pump

The Agilent VacIon Plus 55 pump is a 55 L/s ion pump regularly used in general-purpose ultrahigh and extreme high vacuum systems for evacuating electron devices, sensitive electron microscopes, and obtaining UHV pressures in particle accelerators, synchrotron rings, and surface analysis applications.

The patented StarCell element delivers best-in-class pumping speeds for noble gases and hydrogen, and highest capacity for methane, argon, and helium. Options such as optical baffles, integral heaters, and high-voltage feedthroughs are available for easy system integration.

Product details Related Product


  • Select from StarCell, diode, and noble diode elements to provide the best pumping speed for different gases
  • Available with ConFlat 4.5² non-rotatable flange, additional 2.75² ConFlat port, and a choice of feedthroughs (Fischer, King, DESY, Varian, SHV 10kV (Safeconn)) in different orientations
  • No moving parts ensures vibration-free operation for sensitive applications
  • Low leakage current provides stable vacuum pressure reading
  • Low magnetic field minimizes system interference
  • Vacuum processed at >400 °C and pinched off under vacuum to ensure cleanliness and vacuum integrity prior to installation
  • Customizable with different high-voltage feedthroughs, body geometries, additional ports, and pumping cell arrangements and available with optically shielded baffles, external heaters, and magnetic shielding to meet your needs
  • SEM versions are available with ultralow leakage current and high stability for minimal electrical interference
  • Special testing procedures for your specific requirements can be added


Element Type
  • StarCell
  • Noble Diode
  • Diode
  • SEM
Feedthrough Style
  • Fischer
  • SHV
Heater Power
  • 250 W
Heater Voltage
  • 100-120/200-240 V
Inlet Flange
  • 4 ½ inch CFF (NW 63)
Maximum Baking Temperature
  • 350 °C
Maximum Starting Pressure
  • ≤5 x 10-2 mbar
Operating Life
  • 80,000 hours
Ultimate Pressure
  • < 1 x 10-11 mbar
Weight (pump only)
  • 18 kg
  • 40 lbs



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