




TwisTorr 74 FS
The Agilent 70 L/s turbomolecular pump, TwisTorr 74 FS, combines TwisTorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability, and economy. This 70 L/s turbo pump delivers high vacuum performance thanks to the synergy between turbo technology and innovative TwisTorr drag stages. Floating Suspension assures low vibration and acoustical noise for compatibility with sensitive instrumentation and work environments.
This small turbo pump is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research and electron microscopy.
The TwisTorr 74 FS is available with onboard or rack controllers.
Product details
Features
- Innovative TwisTorr technology – High compression ratio for light gases and very compact rotor design provides high performance and minimal system footprint.
- High Foreline Tolerance – Permits use of smaller backing pump, thereby reducing system cost and size.
- Agilent Floating Suspension – Low vibration and acoustical noise, optimal bearing working conditions, extended operating life all optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
- Unique bearing & dry lubrication – Maintenance free, oil free; allows installation in any orientation.
How it works
Technology
Specifications
Pumping speed | KF40 | CFF 2.75″ | ISO 63 | CFF 4.5″ |
N2 | 44 L/s | 50 L/s | 60 L/s | 60 L/s |
He | 33 L/s | 40 L/s | 54 L/s | 54 L/s |
H2 | 28 L/s | 31 L/s | 42 L/s | 42 L/s |
Ar | 40 L/s | 51 L/s | 59 L/s | 59 L/s |
Max Gas Throughput (*) | Air Cooling | Water Cooling | ||
(35°C ambient temperature) | (25°C water temp. / 35°C ambient temp.) | |||
N2 | 130 sccm | 130 sccm | ||
Ar | 80 sccm | 80 sccm | ||
(*) Backing pump 5 m3/h | ||||
Compression ratio and foreline tolerance (**) | ||||
N2 | 1.0 x 109 | >12 mbar | ||
He | 2.0 x 105 | >10 mbar | ||
H2 | 1.0 x 104 | >04 mbar | ||
Ar | > 1.0 x 109 | >14 mbar | ||
(**) Foreline Tolerance defined as the pressure at which the turbopump still produces a compression of 100, estimated in water cooling mode | ||||
Base pressure with recommended forepump | <5 x 10-10 mbar | |||
<3.75 x 10-10 Torr) | ||||
Inlet flange | KF 40, ISO 63, CFF 4.5”, CFF 2.75” | |||
Foreline flange | KF 16 NW | |||
Rotational speed | 70000 rpm (1167 Hz driving frequency) | |||
Start-up time | <2 minutes | |||
Recommended forepump | Agilent DS 40M / DS 102 Rotary Vane Pump | |||
Agilent IDP-3/IDP-7 Dry Scroll Pump | ||||
Operating position | Any | |||
Operating ambient temperature | +5 °C to +35 °C | |||
Relative humidity of air | 0 – 90 % (not condensing) | |||
Bakeout temperature | 80 °C for ISO (120 °C for CFF) | |||
at inlet flange | ||||
Lubricant | Permanent lubrication | |||
Cooling requirements | ||||
Air cooling | Forced air (5-35 °C ambient temp.) | |||
Air flow temperature +5° C to +35 °C | ||||
Water Cooling | Water temperature from +15°C to +25°C Water flow min. 65 L/h | |||
Noise pressure level (at 1 mt at full speed) | 40 dB(A) | |||
Storage temperature | -40 °C to +70 °C | |||
Max altitude | 3000 m | |||
Weight kg (lbs) | ISO 63 | 2.05 (4.50) | ||
CFF 4.5” | 3.50 (7.70) | |||
CFF 2.75” | 3.34 (7.35) | |||
KF 40 | 2.37 (5.22) | |||
Conformity to norms | ||||
CE, C-CSA-US, RoHS compliant as per 2011/65/UE |