TwisTorr 74 FS

The Agilent 70 L/s turbomolecular pump, TwisTorr 74 FS, combines TwisTorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability, and economy. This 70 L/s turbo pump delivers high vacuum performance thanks to the synergy between turbo technology and innovative TwisTorr drag stages. Floating Suspension assures low vibration and acoustical noise for compatibility with sensitive instrumentation and work environments.

This small turbo pump is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research and electron microscopy.

The TwisTorr 74 FS is available with onboard or rack controllers.


Product details Related Product


  • Innovative TwisTorr technology - High compression ratio for light gases and very compact rotor design provides high performance and minimal system footprint.
  • High Foreline Tolerance - Permits use of smaller backing pump, thereby reducing system cost and size.
  • Agilent Floating Suspension - Low vibration and acoustical noise, optimal bearing working conditions, extended operating life all optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
  • Unique bearing & dry lubrication - Maintenance free, oil free; allows installation in any orientation.


Pumping speed KF40 CFF 2.75″ ISO 63 CFF 4.5″
N2 44 L/s 50 L/s 60 L/s 60 L/s
He 33 L/s 40 L/s 54 L/s 54 L/s
H2 28 L/s 31 L/s 42 L/s 42 L/s
Ar 40 L/s 51 L/s 59 L/s 59 L/s
Max Gas Throughput (*) Air Cooling Water Cooling
(35°C ambient temperature) (25°C water temp. / 35°C ambient temp.)
N2 130 sccm 130 sccm
Ar 80 sccm 80 sccm
(*) Backing pump 5 m3/h
Compression ratio and foreline tolerance (**)
N2 1.0 x 109 >12 mbar
He 2.0 x 105 >10 mbar
H2 1.0 x 104 >04 mbar
Ar > 1.0 x 109 >14 mbar
(**) Foreline Tolerance defined as the pressure at which the turbopump still produces a compression of 100, estimated in water cooling mode
Base pressure with recommended forepump <5 x 10-10 mbar
<3.75 x 10-10 Torr)
Inlet flange KF 40, ISO 63, CFF 4.5”, CFF 2.75”
Foreline flange KF 16 NW
Rotational speed  70000 rpm (1167 Hz driving frequency)
Start-up time <2 minutes
Recommended forepump Agilent DS 40M / DS 102 Rotary Vane Pump
Agilent IDP-3/IDP-7 Dry Scroll Pump
Operating position Any
Operating ambient temperature +5 °C to +35 °C
Relative humidity of air 0 – 90 % (not condensing)
Bakeout temperature 80 °C for ISO (120 °C for CFF)
at inlet flange
Lubricant Permanent lubrication
Cooling requirements
Air cooling Forced air (5-35 °C ambient temp.)
Air flow temperature +5° C to +35 °C
Water Cooling Water temperature from +15°C to +25°C Water flow min. 65 L/h
Noise pressure level (at 1 mt at full speed) 40 dB(A)
Storage temperature -40 °C to +70 °C
Max altitude 3000 m
Weight kg (lbs) ISO 63 2.05 (4.50)
CFF 4.5” 3.50 (7.70)
CFF 2.75” 3.34 (7.35)
KF 40 2.37 (5.22)
Conformity to norms
CE, C-CSA-US, RoHS compliant as per 2011/65/UE



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