Turbo-V 3K-G (4)
Turbo-V 3K-G (1)
Turbo-V 3K-G (2)
Turbo-V 3K-G (3)

Turbo-V 3K-G

The Agilent high throughput turbomolecular pump, Turbo-V 3K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.

This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.

The pump’s robust design and its advanced integrated electronics make the Agilent Turbo-V 3K-G the optimum pumping solution for the vacuum coating industry.


Features

  • The only truly “integrated” system on the market
  • Highest pumping speeds in its class
  • Oil-free, robust and reliable
  • MTTF of more than 200,000 hours
  • Leading edge rotor design provides significant reduction in weight and mechanical stress
  • Patented rotor-shaft fitting eliminates rotor tensile stress
  • Utilizes Agilent’s A-PLUS software (formerly T-plus)
  • Typical Turbo Pump Applications

How it works


Technology


Specifications

Pumping speed: N2: 2200 l/s He: 1900 l/s Ar: 2050 l/s
Compression ratio: N2: > 1 x 107 He: 6 x 103 Ar: > 1 x 108
Base pressure* (with recommended forepump) <1 x 10-8 mbar
Inlet flange ISO 250F
Foreline flange KF 40 NW
Nominal rotational speed 31,800 rpm
Start-up time without gas load and with the recommended forepump <6 minutes
Foreline pressure < 0.5 mbar
Minimum Recommended forepump > 60 m3/h (depending on gasflow requirements)
Operating position Any
Cooling requirements Water
Weight ISO (250) 52 kg (114.63 lbs)

Literature