Pumping speed |
ISO 100 K / CFF 6”/ ISO 160 K / CFF 8” |
N2 |
250 L/s |
He |
255 L/s |
H2 |
220 L/s |
Ar |
250 L/s |
Max gas flow rate |
N2 |
250 SCCM |
Compression ratio |
N2 |
> 1 x 1011 |
He |
> 1 x 108 |
H2 |
1.5 x 106 |
Ar |
> 1 x 1011 |
Max foreline pressure tolerance N2 |
12 mbar |
Base pressure with recommended forepump |
<1 x 10 -10 mbar |
(<1 x 10 -10 Torr) |
Inlet flange |
ISO 100 K, CFF 6”, ISO 160 K, CFF 8” |
Foreline flange |
KF16 NW (KF25 – optional) |
Rotational speed |
60000 rpm (1010 Hz driving frequency) |
Start-up time |
< 3 minutes (longer when soft start is used) |
Recommended forepump |
Dry pumps: IDP-3 (no gas flow), IDP-7, IDP-10, |
Mechanical: DS102, DS302 |
Operating position |
Any |
Oper. ambient temperature |
+5 °C to +35 °C |
Bakeout temperature |
Max 80 °C at inlet flange |
Lubricant |
Permanent lubrication |
Cooling requirements |
Air cooling |
Natural convection (only with no gas load) |
Forced air (5- 35 °C ambient temperature) |
Water cooling |
Minimum flow: 50 l/h (0.22 GPM) |
Temperature: +15 °C to +30 °C |
Max pressure: 5 bar (75 psi) |
Noise pressure level |
41 dB(A) |
(at 1m at full speed) |
Storage temp. |
-40°C to +70°C |
Weight kg (lbs) |
ISO 100 K 5,84 kg (12,8) |
TwisTorr 305 FS |
CFF 6’’ 8,16 kg (17,9) |
|
ISO 160 K 6,28 kg (13,8) |
|
CFF 8’’ 10.43 kg (22.9) |
Compliance with: |
EN 61010-1 |
EN 61326-1 |
EN 1012-2 |
EN 12100 |
EN 50581 |
Machinery Directive 2006/42/EC |
Electromagnetic Compatibility Directive |
2014/30/EU Directive 2011/65/EU |
Power supply (24 Vdc): |
Input voltage
Max input power
Stand-by power
Max operating power |
24 Vdc
200 W
10 W
150 W with water or air cooling |
Protection fuse |
8 A |
USB communication |
as per USB 1.1 |