Turbo-V 1K-G
The Agilent high throughput turbomolecular pump, Turbo-V 1K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flow s of Argon under high temperature load.
This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.
The pump’s robust design and its advanced electronics, rack type or onboard solution, make the Agilent Turbo-V 1K-G the optimum pumping solution for the vacuum coating industry.
Product details
Features
- Application-specific pumping solution designed for thin film deposition equipment
- High Pumping speed and high gas throughput
- Rugged design and highly efficient cooling system for continuous operation
- Gas Purge for bearing protection
- Rack type of Navigator on board controllers
- Versatile electronics interface with easy-to-use control Software
- Analog I/O signals and RS232 / RS485 interface as standard Agilent Profibus interface as option
- Typical Turbo Pump Applications
How it works
Technology
Specifications
| Pumping speed: | ||||
| ISO 160: | Ar: 750 l/s | N2: 810 l/s | He: 950 l/s/ | H2: 680 l/s |
| ISO 200: | Ar: 1,040 l/s | N2: 1,080 l/s | He: 1,150 l/s | H2: 730 l/s |
| Compression ratio: | Ar: 5 x 108 | N2: 5 x 107 | He: 4 x 104 | H2 1.5 x 104 |
| Base pressure* (with recommended forepump) | <1 x 10-10 mbar | |||
| Inlet flange | ISO 160F, ISO 200F | |||
| Foreline flange | KF 25 NW | |||
| ISO 160: | KF 40 NW | |||
| ISO 200: | ||||
| Nominal rotational speed | 45,500 rpm | |||
| Start-up time | <5 minutes | |||
| Minimum recommended forepump | > 20 m3/h (TriScroll 600, DS 602) | |||
| Operating position | Any | |||
| Operating ambient temperature | +5 °C to +35 °C | |||
| Bakeout temperature | 80 °C at inlet flange max. (ISO flange) | |||
| Vibration level (displacement) | <0.01 μm at inlet flange | |||
| Cooling requirements | Water | |||
| Power supply | < Input freq.: 50 – 60 Hz | Max input power: 600 VA | Stand-by power: 30 to 35 W | |
| Input voltage: 100-240 Vac | 400 W using Nitrogen and lighter gases (water cooling setting) | |||
| Max operating power: | 260 W using Argon (air cooling setting) | |||
| Protection fuse (Navigator controller) | 1 x 6.3 A | |||
| Serial communication (Navigator Kit) | RS232 cable with a 9-pin D type | male connector and a 9-pin D type female connector, and Navigator software (optional) | ||
| Storage temperature | -20 °C to +70 °C | |||
| Weight | 26.8 kg (59.1 lbs) |
