[vc_row][vc_column width="1/4" text_align="center" is_sticky="yes" sticky_min_width="767" sticky_top="110" sticky_bottom="0"][porto_ultimate_heading main_heading="Product details" main_heading_font_weight="" sub_heading_font_weight="" alignment="left" main_heading_font_size="20"][/porto_ultimate_heading][porto_sidebar_menu nav_menu="26"][/vc_column][vc_column width="3/4"][vc_row_inner css=".vc_custom_1589725639215{margin-bottom: 30px !important;}" el_id="Features"][vc_column_inner][porto_ultimate_heading main_heading="Features" main_heading_font_weight="" sub_heading_font_weight="" alignment="left" main_heading_margin_bottom="5"]
- Application-specific pumping solution designed for thin film deposition equipment
- High Pumping speed and high gas throughput
- Rugged design and highly efficient cooling system for continuous operation
- Gas Purge for bearing protection
- Rack type of Navigator on board controllers
- Versatile electronics interface with easy-to-use control Software
- Analog I/O signals and RS232 / RS485 interface as standard Agilent Profibus interface as option
- Typical Turbo Pump Applications
[/porto_ultimate_heading][vc_separator color="custom" style="solid" accent_color="#dddddd"][/vc_column_inner][/vc_row_inner][vc_row_inner css=".vc_custom_1589991781482{margin-bottom: 30px !important;}" el_id="How-It-Works"][vc_column_inner][porto_ultimate_heading main_heading="How it works" main_heading_font_weight="" sub_heading_font_weight="" alignment="left" main_heading_margin_bottom="5"][/porto_ultimate_heading][vc_separator color="custom" style="solid" accent_color="#dddddd"][/vc_column_inner][/vc_row_inner][vc_row_inner css=".vc_custom_1589991754794{margin-bottom: 30px !important;}" el_id="Technology"][vc_column_inner][porto_ultimate_heading main_heading="Technology" main_heading_font_weight="" sub_heading_font_weight="" alignment="left" main_heading_margin_bottom="5"][/porto_ultimate_heading][vc_separator color="custom" style="solid" accent_color="#dddddd"][/vc_column_inner][/vc_row_inner][vc_row_inner css=".vc_custom_1589991816578{margin-bottom: 30px !important;}" el_id="Specifications"][vc_column_inner][porto_ultimate_heading main_heading="Specifications" main_heading_font_weight="" sub_heading_font_weight="" alignment="left" main_heading_margin_bottom="5"]
Pumping speed: |
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ISO 160: |
Ar: 750 l/s |
N2: 810 l/s |
He: 950 l/s/ |
H2: 680 l/s |
ISO 200: |
Ar: 1,040 l/s |
N2: 1,080 l/s |
He: 1,150 l/s |
H2: 730 l/s |
Compression ratio: |
Ar: 5 x 108 |
N2: 5 x 107 |
He: 4 x 104 |
H2 1.5 x 104 |
Base pressure* (with recommended forepump) |
<1 x 10-10 mbar |
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Inlet flange |
ISO 160F, ISO 200F |
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Foreline flange |
KF 25 NW |
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ISO 160: |
KF 40 NW |
ISO 200: |
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Nominal rotational speed |
45,500 rpm |
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Start-up time |
<5 minutes |
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Minimum recommended forepump |
> 20 m3/h (TriScroll 600, DS 602) |
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Operating position |
Any |
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Operating ambient temperature |
+5 °C to +35 °C |
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Bakeout temperature |
80 °C at inlet flange max. (ISO flange) |
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Vibration level (displacement) |
<0.01 μm at inlet flange |
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Cooling requirements |
Water |
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Power supply |
< Input freq.: 50 - 60 Hz |
Max input power: 600 VA |
Stand-by power: 30 to 35 W |
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Input voltage: 100-240 Vac |
400 W using Nitrogen and lighter gases (water cooling setting) |
Max operating power: |
260 W using Argon (air cooling setting) |
Protection fuse (Navigator controller) |
1 x 6.3 A |
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Serial communication (Navigator Kit) |
RS232 cable with a 9-pin D type |
male connector and a 9-pin D type female connector, and Navigator software (optional) |
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Storage temperature |
-20 °C to +70 °C |
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Weight |
26.8 kg (59.1 lbs) |
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[/porto_ultimate_heading][vc_separator color="custom" style="solid" accent_color="#dddddd"][/vc_column_inner][/vc_row_inner][vc_row_inner css=".vc_custom_1596514296631{margin-bottom: 30px !important;}" el_id="Literature"][vc_column_inner][porto_ultimate_heading main_heading="Literature" main_heading_font_weight="" sub_heading_font_weight="" alignment="left" main_heading_margin_bottom="5"][/porto_ultimate_heading][porto_toggles type="toggle-simple" size="toggle-sm"][vc_toggle title="Key Literature"][/vc_toggle][/porto_toggles][vc_separator color="custom" style="solid" accent_color="#dddddd"][/vc_column_inner][/vc_row_inner][/vc_column][/vc_row][vc_row][vc_column][vc_column_text]
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