| Pumping speed |
ISO 100 K / CFF 6”/ ISO 160 K / CFF 8” |
| N2 |
250 L/s |
| He |
255 L/s |
| H2 |
220 L/s |
| Ar |
250 L/s |
| Max gas flow rate |
| N2 |
250 SCCM |
| Compression ratio |
| N2 |
> 1 x 1011 |
| He |
> 1 x 108 |
| H2 |
1.5 x 106 |
| Ar |
> 1 x 1011 |
| Max foreline pressure tolerance N2 |
12 mbar |
| Base pressure with recommended forepump |
<1 x 10 -10 mbar |
| (<1 x 10 -10 Torr) |
| Inlet flange |
ISO 100 K, CFF 6”, ISO 160 K, CFF 8” |
| Foreline flange |
KF16 NW (KF25 – optional) |
| Rotational speed |
60000 rpm (1010 Hz driving frequency) |
| Start-up time |
< 3 minutes (longer when soft start is used) |
| Recommended forepump |
Dry pumps: IDP-3 (no gas flow), IDP-7, IDP-10, |
| Mechanical: DS102, DS302 |
| Operating position |
Any |
| Oper. ambient temperature |
+5 °C to +35 °C |
| Bakeout temperature |
Max 80 °C at inlet flange |
| Lubricant |
Permanent lubrication |
| Cooling requirements |
| Air cooling |
Natural convection (only with no gas load) |
| Forced air (5- 35 °C ambient temperature) |
| Water cooling |
Minimum flow: 50 l/h (0.22 GPM) |
| Temperature: +15 °C to +30 °C |
| Max pressure: 5 bar (75 psi) |
| Noise pressure level |
41 dB(A) |
| (at 1m at full speed) |
| Storage temp. |
-40°C to +70°C |
| Weight kg (lbs) |
ISO 100 K 5,84 kg (12,8) |
| TwisTorr 305 FS |
CFF 6’’ 8,16 kg (17,9) |
| |
ISO 160 K 6,28 kg (13,8) |
| |
CFF 8’’ 10.43 kg (22.9) |
| Compliance with: |
EN 61010-1 |
| EN 61326-1 |
| EN 1012-2 |
| EN 12100 |
| EN 50581 |
| Machinery Directive 2006/42/EC |
| Electromagnetic Compatibility Directive |
| 2014/30/EU Directive 2011/65/EU |
| Power supply (24 Vdc): |
Input voltage
Max input power
Stand-by power
Max operating power |
24 Vdc
200 W
10 W
150 W with water or air cooling |
| Protection fuse |
8 A |
| USB communication |
as per USB 1.1 |