| Pumping speed |
KF40 |
CFF 2.75″ |
ISO 63 |
CFF 4.5″ |
| N2 |
44 L/s |
50 L/s |
60 L/s |
60 L/s |
| He |
33 L/s |
40 L/s |
54 L/s |
54 L/s |
| H2 |
28 L/s |
31 L/s |
42 L/s |
42 L/s |
| Ar |
40 L/s |
51 L/s |
59 L/s |
59 L/s |
| Max Gas Throughput (*) |
Air Cooling |
Water Cooling |
| (35°C ambient temperature) |
(25°C water temp. / 35°C ambient temp.) |
| N2 |
130 sccm |
130 sccm |
| Ar |
80 sccm |
80 sccm |
| (*) Backing pump 5 m3/h |
| Compression ratio and foreline tolerance (**) |
| N2 |
1.0 x 109 |
>12 mbar |
| He |
2.0 x 105 |
>10 mbar |
| H2 |
1.0 x 104 |
>04 mbar |
| Ar |
> 1.0 x 109 |
>14 mbar |
| (**) Foreline Tolerance defined as the pressure at which the turbopump still produces a compression of 100, estimated in water cooling mode |
| Base pressure with recommended forepump |
<5 x 10-10 mbar |
| <3.75 x 10-10 Torr) |
| Inlet flange |
KF 40, ISO 63, CFF 4.5”, CFF 2.75” |
| Foreline flange |
KF 16 NW |
| Rotational speed |
70000 rpm (1167 Hz driving frequency) |
| Start-up time |
<2 minutes |
| Recommended forepump |
Agilent DS 40M / DS 102 Rotary Vane Pump |
| Agilent IDP-3/IDP-7 Dry Scroll Pump |
| Operating position |
Any |
| Operating ambient temperature |
+5 °C to +35 °C |
| Relative humidity of air |
0 – 90 % (not condensing) |
| Bakeout temperature |
80 °C for ISO (120 °C for CFF) |
| at inlet flange |
| Lubricant |
Permanent lubrication |
| Cooling requirements |
| Air cooling |
Forced air (5-35 °C ambient temp.) |
| Air flow temperature +5° C to +35 °C |
| Water Cooling |
Water temperature from +15°C to +25°C Water flow min. 65 L/h |
| Noise pressure level (at 1 mt at full speed) |
40 dB(A) |
| Storage temperature |
-40 °C to +70 °C |
| Max altitude |
3000 m |
| Weight kg (lbs) |
ISO 63 |
2.05 (4.50) |
| CFF 4.5” |
3.50 (7.70) |
| CFF 2.75” |
3.34 (7.35) |
| KF 40 |
2.37 (5.22) |
| Conformity to norms |
| CE, C-CSA-US, RoHS compliant as per 2011/65/UE |
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