Turbo-V 3K-G

The Agilent high throughput turbomolecular pump, Turbo-V 3K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.

This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.

The pump’s robust design and its advanced integrated electronics make the Agilent Turbo-V 3K-G the optimum pumping solution for the vacuum coating industry.

Category: Turbo Pump Controllers

Product details Related Product

Product Details

Features

The only truly "integrated" system on the market
Highest pumping speeds in its class
Oil-free, robust and reliable
MTTF of more than 200,000 hours
Leading edge rotor design provides significant reduction in weight and mechanical stress
Patented rotor-shaft fitting eliminates rotor tensile stress
Utilizes Agilent's A-PLUS software (formerly T-plus)
Typical Turbo Pump Applications

Specifications

Pumping speed:	N₂: 2200 l/s	He: 1900 l/s	Ar: 2050 l/s
Compression ratio:	N₂: > 1 x 10⁷	He: 6 x 10³	Ar: > 1 x 10⁸
*Base pressure (with recommended forepump)**	<1 x 10^-8 mbar
Inlet flange	ISO 250F
Foreline flange	KF 40 NW
Nominal rotational speed	31,800 rpm
Start-up time without gas load and with the recommended forepump	<6 minutes
Foreline pressure	< 0.5 mbar
Minimum Recommended forepump	> 60 m³/h (depending on gasflow requirements)
Operating position	Any
Cooling requirements	Water
Weight ISO (250)	52 kg (114.63 lbs)

Video

Video