VacIon Plus 150 Combination Pump

The CombiTSP 150 integrates the VacIon 150 L/s pump, TSP cartridge, and TSP cryopanel to increase pumping speed in the same footprint. The gettering properties of the TSP cartridge deliver faster pump down to ultrahigh and extreme high vacuum (UHV/XHV) enabling lower ultimate base pressure. The cryopanel further improves pumping efficiency for getterable gases. High pumping speed The StarCell element provides the highest speed and capacity for methane, argon, and helium.

Ideal for particle physics and other low-pressure based research such as surface science, nanotechnology, materials science, these pumps are customizable with different high-voltage feedthroughs, body geometries, and pumping elements to meet your needs.

Category:
Product details Related Product

Features

  • This ion-TSP combination pump is a VacIon Plus 150 with an extra side- or bottom-mounted 6² ConFlat port
  • Available with StarCell, diode, or noble diode elements for the best noble gas pumping speed
  • Available with ConFlat 6² non-rotatable inlet flange and additional 8² ConFlat port in double-ended or side port configuration
  • The cryopanel is mounted on an 8² OD ConFlat flange and includes a 2.75² ConFlat flange for TSP source mounting
  • The TSP cartridge is included but not installed inside the pump
  • The cryopanel provides a larger surface area for sublimated titanium from TSP and shields the vacuum system from unwanted coating.
  • The cryopanel increases the efficiency of the gettering process when cooled with liquid nitrogen and increases the water pumping speed. Can also operate with water cooling, or uncooled when used at UHV/XHV applications.
  • Available with 120 Vac or 230 Vac heaters installed and a choice of feedthroughs (Fischer, King, DESY, Varian, SHV 10kV (Safeconn))
  • Cables and controllers are available separately

Specifications

Element Type
  • StarCell
  • Noble Diode
  • Diode
Feedthrough Style
  • Fischer
  • SHV
Heater Power
  • 480 W
Heater Voltage
  • 100-120/200-240 V
Inlet Flange
  • 6 inch CFF (NW100)
Maximum Baking Temperature
  • 350 °C
Maximum Starting Pressure
  • ≤5 x 10-2 mbar
Operating Life
  • 80,000 hours
Ultimate Pressure
  • < 1 x 10-11 mbar

Video

Video

Chat zalo
Chat messenger
Liên hệ chúng tôi