IDP Dry Scroll Pumps

Agilent Isolated Dry Scroll Pumps (IDP) are oil-free, compact, quiet, high performance vacuum pumps. IDP pumps use a single-sided scroll design that allows for a straightforward 15-minute maintenance procedure with simple tools. Large pumping speeds and compact sizes are ideal for many applications in the research, analytical instrument, and laboratory markets.

IDP pumps are hermetic, with the motor and all bearings completely isolated from the vacuum path. This design extends the bearing life and provides clean, dry vacuum to the application. An inlet isolation valve is available as an integral option that adds no additional height to the pump. The IDP-10 uses an inverter driven motor, which provides uniform vacuum performance at all global frequencies and input voltages. Its uniform global performance and compact size make it an ideal choice for analytical instruments and industrial OEMs.


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IDP Dry Scroll Pumps Pumping Speed  Base Pressure            Motor Rating/Operating Voltage           Common Applications Choose this model if…
IDP-3 60 Hz/24 VDC: 60 l/m, 3.6 m3/hour 3.3 x 10-1 mbar, 2.5 x 10-1 Torr 0.16 HP (120 W)/100-120; 200-240 VAC Leak Detection You want the lightest, most compact primary pump.
50 Hz: 50 l/m, 3.0 m3/hour GC Mass Spectrometry You need to integrate the pump into your instrument.
  Helium Recirculation You want a 24V drive.
IDP-7 60 Hz: 152 l/m, 9.1 m3/hour 60 Hz: 2.6 x 10-2mbar 0.38 HP (300 W)/100-120; 200-240 VAC Vacuum Ovens You need a bit more pumping speed, but you want a compact, tabletop pump.
50 Hz: 120 l/m, 7.2 m3/hour 2.0 x 10-2 Torr Helium Recirculation You need to handle water vapor.
  50 Hz: 4.0 x 10-2mbar, 3.0 x 10-2Torr Backing High Vacuum Pump
    General Laboratory Vacuum
IDP-10 170 L/min, 10.2 m3/h 2.0 x 10-2 mbar 1.5 x 10-2 Torr 0.5 HP (350 W)/100-127; 200-240 VAC Microscopy Instruments You want to guarantee universal pumping performance at all input frequencies.
at full rotational speed Surface Analysis Instruments You want remote speed control or on/off capability.
Helium Recirculation
Thin Film Deposition
IDP-15 60 Hz>: 256 l/m, 15.4 m3/hour 1.33 x 10-2 mbar 1 x 10-2 Torr 0.75 HP (560 W)/100-115; 220-230 VAC General Laboratory Vacuum You want the quietest pump available.
50 Hz: 214 l/m, 12.8 m3/hour Thin Film Deposition You want the lowest vibration at inlet available.
  LED, Bulb Manufacturing You need to evacuate a large chamber.

Add the inlet isolation valve if…

Instrumentation You want to protect your system and high vacuum pump in case of power loss.
Beam and Particle Physics You want to isolate the pump inlet during turbulent stop and start.
Backing a Turbo Pump




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