
MS Series Rotary Vane Pumps
Agilent MS Series high capacity, single stage, oil-lubricated rotary vane pumps are powerful, compact and environmentally-friendly alternatives to larger industrial pumps with similar speeds. The flexible MS Series features robust and reliable components, high pumping speed at low pressure, low noise and easy installation. Our reliable pumps are often used in combination with Turbomolecular or Diffusion HV pumps in a wide range of industry applications including metallurgy, heat treatment, vacuum coating, electron beam welding (EBW), Helium leak detection and liquefied natural gas (LNG) transportation.
Product details
Features
How it works
Technology
Specifications
MS Series Rotary Vane Pumps | Pumping Speed | Description | Features |
MS-101 | 60 Hz: 109 m3/hour, 64 cfm | Discover Agilent’s compact MS-101 rotary vane pump, delivering stable industrial performance with low noise. | Powerful and efficient industrial performance and stability for a wide range of applications |
50 Hz: 95 m3/hour, 56 cfm | Environmentally friendly and cost-effective due to reduced power requirements | ||
Highly efficient oil circulation system ensures excellent lubrication and sealing in all critical areas | |||
Cover design optimizes cooling air channels | |||
Floating valve for better oil recovery and integrated heat exchanger carries away excess heat | |||
Robust, high quality components and fittings ensure superb sealing | |||
MS-301 | 60 Hz: 290 m3/hour, 170 cfm | High pumping speed, even at low pressures, and smooth performance across the entire operating pressure range due to shorter cycle times | |
50 Hz: 250 m3/hour, 150 cfm | Excellent industrial performance in applications ranging from manufacturing and cryogenics to process technology and pharmaceutical uses | ||
Low operating ultimate partial pressure of ≤ 8 x 10-2 mbar (≤ 6 x 10-2 Torr) with gas ballast close1d | |||
Environmentally-friendly demister system and floating valve for enhanced oil management | |||
Optimized cooling design with air channels and integrated heat exchanger | |||
Reliable and efficient oil circulation for improved lubrication and sealing | |||
MS-631 | 60 Hz: 680 m3/hour, 400 cfm | Highly robust for challenging industry applications and operating conditions | |
50 Hz: 590 m3/hour, 350 cfm | Proven performance in pharmaceuticals, manufacturing, coatings systems, process technology, and metallurgy and heat treatments | ||
Low operating ultimate partial pressure of ≤ 8 x 10-2 mbar (≤ 6 x 10-2 Torr) with gas ballast close1d | |||
Integrated demister system limits oil exhaust over working pressures, and floating valve for oil recovery | |||
Easy to install – small physical footprint | |||
Optimized design maximizes cooling air channels and an integrated heat exchanger removes excess heat | |||
MS-631FL Frameless | High-capacity | Single stage, oil lubricated rotary vane pump, that can be directly coupled to an Agilent Roots Pump (up to RP-3001 size) without the need of a frame. Ideal for thin-film coatings, vacuum meallurgy, helium leak detection and electron beam welding. | Anti-suckback valve prevents system contamination |
Floating oil recovery valve | |||
Carbon composite vanes extend pump life | |||
Air cooled | |||
Oil recirculation system | |||
Minimum footprint | |||
Easy to service |