HS-32 Diffusion Pump

Available in 2 in. and 16 in. through 35 in. sizes, the low-cost HS-series pumps provide high speed, low ultimate pressure, high throughput, high tolerable forepressure, and low backstreaming. The HS-Series diffusion pumps come with full thermal protection and optional quick-cool coils. The 16 in. through 35 in. pumps come with sight glass/fill and drain assemblies, and are available with ASA or ISO flanges.

Product details Related Product


  • Five-stage fractionating jet purifies pumping fluid
  • High throughput, 9600-watt version available
  • High tolerable forepressure
  • Full thermal protection
  • Fill and drain assembly for pump oil
  • Fluid-level sight glass provides quick indication of pump fluid status at all times
  • Standard gauge port (NW-25) below inlet flange included
  • Foreline baffle prevents loss of fluid into backing pump system
  • Optional halo baffle reduces backstreaming without adding height
  • Optional quick cool coil


Pumping Speed, Operating Range 17,300 l/s Air, 21,625 l/s He and H2
Pumping Speed, AVS 4.1 (1963) 32,000 l/s Air
Maximum Throughput 30 T-l/s (40 mbar l/s) in operating range, 35 T-l/s (45 mbar-l/s) @ 0.01 torr
Operating Range 1.7 x 10-3 to <5 x 10-8 torr (2.3 x 10-3 to <6.5 x 10-8 mbar)
Maximum Forepressure No Load: 0.50 torr (0.65 mbar) Full Load: 0.35 torr (0.45 mbar)
Recommended Backing Pump ɛ300 cfm (510 m3/hr)
Backstreaming Rate, Standard Cold Cap <7 x 10-4 mg/cm2/min
Warmup Time 60 minutes
Cooldown Time 180 minutes
Fluid Charge 3 U.S. gallons (11.3 liters)
Electrical Requirements 3 ph, 50/60 Hz, 240/415/480 VAC
Pump Power 24,000 watts
Cooling Water Requirements 4 gpm (800 l/hr) at 60-80°F (15-26°C)
Water Connections 3⁄8 in. FPT Tee



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